(99.7% BN Plate Produced by Wintrustek)
AlN heater has exceptional thermal conductivity, and it is commonly used to support and heat the silicon wafers. AlN heater is co-sintered with resistance heating elements to minimize metal contamination and offer superior thermal uniformity. Additionally, when compared to traditional metal heaters, it usually achieves excellent chemical resistance.
A device that firmly holds, moves, or handles things (workpieces) using electrostatic force is called an electrostatic chuck (ESC). Positive and negative charges are present in all materials, even though they are undetectable to the naked eye. The positive and negative charges inside a workpiece realign to match the polarity of the electrodes when it is put on an ESC and a bipolar voltage is delivered to its internal electrodes. The ESC's gripping mechanism is based on the electrostatic force that exists between it and the workpiece.By chucking the silicon wafer and maintaining its flat surface, these electrostatic chucks enable the wafer to evenly distribute the heat it receives from the plasma.
When it comes to sinter AlN heater and ESC, avoiding contamination is very important. Wintrustek's 99.7% BN can avoid contaminating on AlN heater and ESC during the sintering process.
Compared to Denka's NB-1000, we have the following advantages:
Boron nitride is a common electrical insulator and a favorable heat conductor. Outstanding lubrication, resistance to oxidation and corrosion, insulation, thermal conductivity, and chemical stability are all attributes of hexagonal boron nitride. It is the raw material for the synthesis of cubic boron nitride and can be used to create TiB₂/BN composite ceramics, advanced refractory materials, super hard materials, break rings for horizontal continuous rolling steel, and high-temperature-resistant lubricants and coatings.
Excellent chemical stability is a feature of 99.7% boron nitride. It doesn't wet or affect the majority of metal melts. As a result, it can be utilized as a high-temperature galvanic couple protection cover, melting metal crucibles, utensils, pump parts, pipelines for moving liquid metal, cast steel abrasive tools, and high-temperature electrical insulation materials.
Although 99.7% boron nitride is white and offers strong electrical insulation, its lubricating capabilities, effective thermal conduction, and ease of machining make it comparable to graphite. It can also hold most molten metals since they don't wet it. Applications involving abrupt temperature fluctuations can benefit from its exceptional resilience to thermal shock. It won't react or get wet with various glasses and molten metals. Furthermore, it works well as an electrical insulator.
