
Pyrolytic Boron Nitride (PBN) is fabricated by the well-known Chemical Vapor Deposition (CVD) process in which the ammonia gas (NH3) and a gaseous boron halide such as boron trichloride(BCI3) are reacting in a high temperature CVD furnace to deposit PBN on an appropriate substrate such as Pyrolytic Graphite.
PBN is known as an excellent choice for high-temperature furnace and electrical components, semiconductor and microwave compounds crystals such as germanium(Ge), gallium arsenide(GaAs), and indium phosphate(InP) owing to its intrinsic purity, superior mechanical properties, and physico-chemical stability. PBN can withstand at 1800°C in vacuum and 2000°C in nitrigen, introducing it as a good choice for furnace components and melting vessels.
Typical Properties
Layered structure with hexagonal crystal lattice
Special properties perpendicular to the basal plane of the crystal
Superior structural and physico-chemical stability
Anisotropic structure
High thermal stability
Non-wetting
Non-toxic
Typical Applications
PBN crucibles for Vertical Gradient Freezing (VGF) process
PBN crucibles for Liquid encapsulation Czochralski (LEC) process
PBN crucibles for Molecular Beam Epitaxy (MBE) process
PBN crucibles for Organic Light Emitting Diode (OLED) process
PBN boats for compound semiconductors and alloys processing
PBN Metal-Organic CVD (MOCVD) insulation boards and MBE insulation rings
PBN electrical insulation bushings for high-temperature vacuum equipment
PBN traveling wave tube (TWT) with spiral structure
PBN Electrostatic Chuck
PBN-PG composite heaters