(Metallized CeramicTsim los ntawmWintrusetk)
Ceramic metallizationyog txheej txheem ntawm depositing ib tug heev adherent hlau txheej mus rau ib tug ceramic nto. Qhov no yog ib kauj ruam tseem ceeb vim tias ceramics yog inherently unwettable rau solder. Cov txheej metallized ua rau lawv tuaj yeem ua tau, muab lub hauv paus tsim nyog rau kev sib txuas ntawm cov ceramic-rau-hlau muaj zog.
Hauv qab no yog cov ntsiab lus ntawm plaub txoj hauv kev siv hauv kev lag luam niaj hnub no.
1. Molybdenum-Manganese (Mo-Mn)Method: Tus Txheej Txheem Kev Lag Luam
CovMo-Mntxheej txheem yog feem ntau siv thiab zoo-tsim ceramic metallization tshuab. Txij li thaum nruab nrab xyoo pua nees nkaum, nws tau ua tus txheej txheem rau kev tsim cov ntsaws ruaj ruaj hauv cov tshuab nqus tsev hluav taws xob thiab kev siv aerospace.
Txoj Cai Txheej Txheem:npaj cov slurry ntawm refractory molybdenum hmoov, manganese hmoov, thiab activators (xws li Al2O3, SiO2, thiab CaO) nyob rau hauv ib tug organic binder. Cov slurry no yog siv rau ntawm qhov chaw ceramic thiab sintered ntawm qhov kub thiab txias (1300-1600 ° C) nyob rau hauv ib puag ncig hydrogen (dew point = +30 ° C).
Qhov zoo: Nws muaj lub zog sealing siab (nce txog 60.2 ± 7.7 MPa nrog rau txoj kev qhib) thiab lub tshuab nqus tsev zoo heev (nrog rau tus nqi qis li 2.3 × 10⁻¹¹ Pa·m³ / s). Cov txheej txheem tso cai rau ntau lub voj voog rov ua haujlwm thiab tau txais txiaj ntsig los ntawm qhov dav, zam lub qhov rais txheej txheem.
Kev txwv:High sintering kub yuav hloov cov yam ntxwv ceramic. Cov txheej txheem xav tau cov cuab yeej siv hluav taws xob loj loj, ua rau lub sijhawm mus ntev. Tsis tas li ntawd, nws yog incompatible nrog non-oxide ceramics xws li AlN thaum tsis muaj txheej txheem ua ntej oxidation.
2. Txoj kev sib tua hluav taws: Pab kom Multilayer Wiring
Txoj kev sib koom ua ke suav nrog metallization ncaj qha rau hauv cov txheej txheem ceramic sintering. Lub ntsiab lus tseem ceeb yog "kev sib koom ua ke ntawm cov xim ntsuab ceramic," uas suav nrog kev tshuaj ntsuam luam tawm cov hlau tsis zoo (xws li tungsten, molybdenum, lossis molybdenum-manganese) mus rau cov ntawv tsis muaj hluav taws xob (ntsuab) ceramic. Cov nplooj ntawv no yog sib txuas thiab fused ua ke kom tiav ob qho tib si ceramic densification thiab internal metallization hauv ib kauj ruam.
3. Direct Bonded tooj liab (DBC)yog Optimized rau Fais Fab Dissipation
Direct Bonded tooj liab (DBC)tau tsim nyob rau hauv 1970s thiab thawj coj ua lag luam los ntawm GE hauv Tebchaws Meskas. Tam sim no nws tau dhau los ua tus qauv thev naus laus zis rau lub zog siab IGBT modules thiab LED tshav kub dissipation substrates. Cov txheej txheem no suav nrog kev sib txuas ncaj qha rau cov ntawv ci tooj liab mus rau ceramic substrate, uas ua rau muaj cov qauv nrog cov thermal conductivity thiab hluav taws xob rwb thaiv tsev.
4. Active Hlau Brazing (AMB): Ib Kauj Ruam Sealing Revolution
Active Hlau Brazing (AMB) yog ib qho tseem ceeb ntawm kev tsim kho tshiab uas sib txuas ua ke metallization thiab brazing rau hauv ib qho txheej txheem yooj yim. Qhov no yog ua tiav los ntawm kev qhia cov ntsiab lus nquag, xws li Ti, Zr, Nb, lossis V, ncaj qha mus rau brazing muab tub lim hlau. Thaum qhov kub thiab txias, cov ntsiab lus no chemically hnov mob nrog cov ceramic los tsim cov txheej txheem tshuaj tiv thaiv nrog cov qauv hlau hlau. Piv txwv li TiO, TiN, thiab Cu3Ti3O. Cov txheej no tso cai rau lub brazing muab tub lim hlau kom moisten cov ceramic nto ncaj qha.
Cov yam ntxwv ntawm txheej txheem:
Kev Ua Haujlwm Yooj Yim: Tshem tawm qhov xav tau rau ib kauj ruam ua ntej metallization cais.
Kev ntsuas kub qis dua: Brazing tshwm sim ntawm qhov kub thiab txias (800-950 ° C).
Tswj Huab Cua: Ua nyob rau hauv lub tshuab nqus tsev lossis siab purity inert cua kom tiv thaiv oxidation ntawm cov khoom nquag.
Khoom siv ntau yam: Haum rau ceramics xws li Al2O3, AlN, thiab Si3N4.
