(I-Metallized CeramicIkhiqizwe nguWintrusetk)
I-Ceramic Metallizationkuyindlela yokufaka insimbi enamathela kakhulu endaweni yobumba. Lesi yisinyathelo esibalulekile ngoba izitsha zobumba azikwazi ukumanziswa ngokwemvelo uma zithengiswa. Isendlalelo esisansimbi sizenza zithengiswe, zinikeze isisekelo esidingekayo sokwenza ukuxhumana okuqinile kwe-ceramic-to-metal.
Ngezansi kufingqiwe izindlela ezine eziyinhloko ezisetshenziswa embonini namuhla.
1. I-Molybdenum-Manganese (Mo-Mn)Indlela: I-Industrial Standard
IMo-Mninqubo iwubuchwepheshe obusetshenziswa kakhulu futhi obusungulwe kahle be-ceramic metallization. Kusukela maphakathi nekhulu lamashumi amabili, bekuyindlela ejwayelekile yokukhiqiza izimpawu ezinokwethenjelwa kakhulu ku-vacuum electronics kanye nezicelo ze-aerospace.
Umgomo Wenqubo:ukulungisa udaka lwempushana ye-molybdenum ephikisayo, impushana ye-manganese, nezivuseleli (isb. i-Al2O3, i-SiO2, ne-CaO) kusibophezelo sezinto eziphilayo. Le slurry isetshenziswa endaweni ye-ceramic futhi ifakwe emazingeni okushisa aphezulu (1300-1600 ° C) endaweni enomswakama we-hydrogen (iphuzu lamazolo = +30 ° C).
Izinzuzo: Inikeza amandla okuvala aphezulu (afinyelela ku-60.2±7.7 MPa ngendlela ecushiwe) kanye nokuqina kwe-vacuum okuhle kakhulu (okunezinga lokuvuza eliphansi njenge-2.3×10⁻¹¹ Pa·m³/s). Inqubo ivumela imijikelezo eminingi yokusebenza kabusha kanye nezinzuzo ezivela ewindini elibanzi, lenqubo yokuxolela.
Imikhawulo:Amazinga okushisa aphezulu e-sintering angase aguqule izici ze-ceramic. Le nqubo idinga imishini emikhulu yesithando somlilo se-hydrogen, okuholela esikhathini somjikelezo omude. Ngaphezu kwalokho, ayihambisani ne-non-oxide ceramics njenge-AlN uma ingekho inqubo ye-pre-oxidation.
2. Indlela Yokudubula Ngokuhlanganyela: Nika amandla Izintambo Eziningi
Indlela yokudubula ngokubambisana ihlanganisa i-metalization ngqo kwinqubo ye-ceramic sintering. Isisekelo esiyinhloko "siwukudubula ngokubambisana kwe-ceramic eluhlaza," okubandakanya ukuphrinta isikrini ukunamathisela kwensimbi okuphikisayo (okufana ne-tungsten, i-molybdenum, noma i-molybdenum-manganese) kumashidi e-ceramic angashisiwe (aluhlaza). Lawa mashidi abe esehlanganiswa futhi ahlanganiswe ndawonye ukuze aqedele kokubili ukuminyana kobumba kanye nokwenza insimbi kwangaphakathi ngesinyathelo esisodwa.
3. I-Direct Bonded Copper (DBC)Ilungiselelwe Ukuqothula Amandla
I-Direct Bonded Copper (DBC)yathuthukiswa ngeminyaka yawo-1970 futhi yaqala ukuhwebelana yi-GE e-United States. Manje isiphenduke ubuchwepheshe obujwayelekile bamamojula we-IGBT wamandla aphezulu kanye nama-substrates akhipha ukushisa kwe-LED. Le nqubo ihlanganisa ukubopha ngokuqondile i-foil yethusi ku-substrate ye-ceramic, okuholela esakhiweni esinokushisa okuphezulu kokushisa kanye nokufakwa kukagesi.
4. I-Active Metal Brazing (AMB): I-One-step Seal Revolution
I-Active Metal Brazing (AMB) iwukuqanjwa okubalulekile okuhlanganisa ukwenziwa kwensimbi nokugqama kube inqubo eyodwa, eyenziwe lula. Lokhu kufezwa ngokwethula izakhi ezisebenzayo, njenge-Ti, Zr, Nb, noma V, ngqo ensimbi yokugcwalisa i-brazing. Emazingeni okushisa aphezulu, lezi zakhi zihlangana ngamakhemikhali ne-ceramic ukuze zenze ungqimba lokusabela olunesakhiwo sebhondi yensimbi. Izibonelo zifaka i-TiO, i-TiN, ne-Cu3Ti3O. Lesi sendlalelo sivumela insimbi yokugcwalisa i-brazing ukuthi imanzise indawo ye-ceramic ngokuqondile.
Izici zenqubo:
Ukugeleza komsebenzi Okwenziwa Lula: Kuqeda isidingo sesinyathelo esihlukile sokwenza insimbi.
Amazinga Okushisa Okusebenza Aphansi: I-Brazing kwenzeka emazingeni okushisa aphansi kakhulu (800–950°C).
I-Atmosphere elawulwayo: Yenza ku-vacuum noma endaweni ehlanzekile ene-inert ukuvimbela ukukhishwa kwe-oxidation yezingxenye ezisebenzayo.
I-Material Versatility: Ifanele izinto zobumba ezifana ne-Al2O3, AlN, ne-Si3N4.
