Tiedustelu
  • CVD PBN PG Composite Ceramic Heater
  • CVD PBN PG Composite Ceramic Heater
  • CVD PBN PG Composite Ceramic Heater
  • CVD PBN PG Composite Ceramic Heater

CVD PBN PG Composite Ceramic Heater

Our Pyrolytic Boron Nitride / Pyrolytic Graphite (PBN/PG) composite ceramic heater combines the electrical conductivity of pyrolytic graphite (PG) with the electrical insulation and chemical inertness of pyrolytic boron nitride (PBN).
  • Ultra-high purity 99.999%
  • Custom voltage and resistance
  • High temperature stability
  • Exceptional thermal uniformity
  • Tuotetiedot

CVD PBN PG Composite Ceramic Heater

Pyrolytic Boron Nitride PBN 

Product Overview

Our Pyrolytic Boron Nitride / Pyrolytic Graphite (PBN/PG) composite ceramic heater combines the electrical conductivity of pyrolytic graphite (PG) with the electrical insulation and chemical inertness of pyrolytic boron nitride (PBN). Unlike metal or SiC heaters, the all‑pyrolytic construction provides ultra‑high purityexcellent temperature uniformity, and zero outgassing – essential for sensitive semiconductor, optoelectronic, and OLED manufacturing processes.

The typical structure consists of a PG heating layer fully encapsulated by PBN, or a PG heater body with a PBN coating, ensuring that only inert, non‑reactive PBN is exposed to the process environment.


Key Features & Benefits


  • High‑Purity Construction – Both PBN and PG are >99.999% pure, eliminating metal contamination (Fe, Cr, Ni, etc.) common in Nichrome, Kanthal, or graphite‑metal hybrid heaters.

  • Excellent Thermal Uniformity – PG's anisotropic thermal conductivity (high in‑plane, low through‑thickness) combined with PBN’s tailored properties delivers uniform heat distribution across the heater surface.

  • Fast Thermal Response – PG offers low thermal mass and high electrical‑to‑thermal conversion efficiency, enabling rapid ramp‑up and cool‑down cycles.

  • Outgassing‑Free – CVD‑deposited PBN and PG have extremely low gas permeability, preserving high vacuum (≤10⁻⁷ Torr or better).

  • Chemical Inertness – PBN encapsulation resists attack from most molten metals, organics, and reactive gases used in MBE or MOCVD.

  • High Operating Temperature – Continuous use up to 1,400°C in vacuum or inert atmospheres; peak temperatures to 1,600°C possible for short durations.

  • Customizable Geometry – Available as flat plate, cylindrical, conical, or custom‑shaped heaters; multiple zones possible.



PBN Product Range

PBN with unique properties and high structural and physicochemical stability can be the best choice as:


  • PBN crucibles for the Vertical Gradient Freezing (VGF) process

  • PBN crucibles for the Liquid Encapsulation Czochralski (LEC) process

  • PBN containers for the Molecular Beam Epitaxy (MBE) process

  • PBN boats for compound semiconductors and alloy processing

  • PBN Metal-Organic CVD (MOCVD) insulation boards and MBE insulation rings

  • PBN electrical insulation bushings for high-temperature vacuum equipment

  • PBN traveling wave tube (TWT) with spiral structure

  • PBN-PG composite heaters

 

GDMS Analysis

Analytical Element

Result(μg/g)

Analytical Element

Result(μg/g)

Li

<0.005

Si

1.7

F

<0.005

CI

<0.005

Na

<0.005

S

<0.005

 



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Xiamen Wintrustek Advanced Materials Co., Ltd.

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Puhelin:0086 13656035645
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