(I-Metallized CeramicIveliswe nguWintrusetk)
I-Metallization ye-Ceramicbubuchule bokubeka intsimbi ebambene kakhulu yokwaleka kumphezulu weceramic. Eli linyathelo elibalulekileyo kuba iiseramics zingenamanzi ngokwendalo xa zithengiswa. I-metalized layer ibenza bathengiselwe, banike isiseko esiyimfuneko sokwenza uxhulumaniso oluqinileyo lwe-ceramic-to-metal.
Apha ngezantsi kukujongwa kweendlela ezine eziphambili ezisetyenziswa kwishishini namhlanje.
1. I-Molybdenum-Manganese (Mo-Mn)Indlela: Umgangatho woShishino
IMo-MnInkqubo yeyona isetyenziswa rhoqo kwaye isekwe kakuhle itekhnoloji ye-ceramic metallization. Ukusukela kwinkulungwane yamashumi amabini, ibiyeyona ndlela isemgangathweni yokuvelisa amatywina athembeke kakhulu kwi-vacuum elektroniki kunye nokusetyenziswa kwe-aerospace.
Inkqubo yoMgaqo-siseko:ukulungiselela i-slurry ye-refractory molybdenum powder, i-manganese powder, kunye ne-activators (umzekelo, i-Al2O3, i-SiO2, kunye ne-CaO) kwi-binder yezinto eziphilayo. Le slurry isetyenziswe kwi-ceramic surface kwaye ifakwe kwiqondo lokushisa eliphezulu (1300-1600 ° C) kwindawo enomswakama we-hydrogen (indawo yamazolo = + 30 ° C).
Izinto eziluncedo: Inika amandla okutywina aphezulu (ukufikelela kwi-60.2±7.7 MPa ngendlela esebenzayo) kunye nokuqina kwevacuum okugqwesileyo (kunye nesantya sokuvuza esisezantsi njenge-2.3×10⁻¹¹ Pa·m³/s). Inkqubo ivumela imijikelo emininzi yokusebenza kwakhona kunye neenzuzo ezivela kwifestile yenkqubo ebanzi, yokuxolela.
Imida:Amaqondo obushushu aphezulu e-sintering angaziguqula iimpawu ze-ceramic. Inkqubo ifuna izixhobo ezinkulu zesithando somlilo se-hydrogen, okukhokelela kwixesha lomjikelo omde. Ngapha koko, ayihambelani neekeramics ezingezizo-oksidi ezifana ne-AlN ngokungabikho kwenkqubo ye-oxidation yangaphambili.
2. Indlela yokudubula ngokudibeneyo: Vula i-Multilayer Wiring
Indlela yokubambisana idibanisa i-metallization ngokuthe ngqo kwinkqubo ye-ceramic sintering. Eyona nto iphambili "kukudubula i-ceramic eluhlaza," ebandakanya ukuprintwa kwesikrini intlama yentsimbi ekhanyelayo (efana ne-tungsten, i-molybdenum, okanye i-molybdenum-manganese) kumaphepha e-ceramic angatshiswanga (aluhlaza). La maphepha aye adityaniswa kwaye adityaniswe kunye ukuze agqibezele zombini i-ceramic densification kunye ne-metallization yangaphakathi kwinyathelo elinye.
3. Ubhedu oluBonde ngokuNgqo (DBC)Ilungiselelwe ukuNcitshiswa kwamandla
Ubhedu oluBonde ngokuNgqo (DBC)yaphuhliswa ngeminyaka yoo-1970 yaze yathengiswa kuqala yi-GE eUnited States. Ngoku iye yaba yitekhnoloji esemgangathweni yeemodyuli zamandla aphezulu e-IGBT kunye nee-substrates zokulahla ubushushu be-LED. Le nkqubo ibandakanya ukudibanisa ngokuthe ngqo i-foil yobhedu kwi-substrate ye-ceramic, okubangelwa isakhiwo esinokushisa okuphezulu kokushisa kunye nokufakelwa kombane.
4. I-Active Metal Brazing (AMB): Inyathelo elinye lokutywina inguquko
I-Active Metal Brazing (AMB) yinto entsha ebalulekileyo edibanisa i-metallization kunye ne-brazing ibe yinkqubo enye, elula. Oku kufezwa ngokuzisa izinto ezisebenzayo, ezifana neTi, Zr, Nb, okanye V, ngokuthe ngqo kwi-brazing filler metal. Kubushushu obuphezulu, ezi elementi zisabelana ngokwekhemikhali nge-ceramic ukuvelisa umaleko wokusabela ngesakhiwo sebhondi yentsimbi. Imizekelo ibandakanya iTiO, iTiN, kunye neCu3Ti3O. Olu luhlu luvumela isinyithi sokuzalisa i-brazing ukuba simanzise i-ceramic surface ngqo.
Iimpawu zenkqubo:
Ukuhamba komsebenzi okwenziwa lula: Iphelisa imfuneko yenyathelo elahlukileyo le-pre-metallization.
Amaqondo obushushu okusebenza asezantsi: Ukubrawuza kwenzeka kumaqondo asezantsi kakhulu (800–950°C).
I-Atmosphere elawulwayo: Yenza kwi-vacuum okanye i-high-purity inert atmosphere ukuthintela i-oxidation yamacandelo asebenzayo.
I-Material Versatility: Ifanelekile kwii-ceramics ezifana ne-Al2O3, i-AlN, kunye ne-Si3N4.
