Ceramic substrates yog cov khoom siv uas feem ntau siv hauv cov khoom siv fais fab. Lawv muaj cov cuab yeej tshwj xeeb, hluav taws xob, thiab thermal yam ntxwv uas ua rau lawv zoo tshaj plaws rau kev siv hluav taws xob hluav taws xob siab.

Ceramic balls muab cov yam ntxwv ua tau zoo rau cov ntawv thov raug rau cov tshuaj hnyav lossis cov xwm txheej uas muaj qhov kub thiab txias heev. Hauv cov ntawv thov xws li cov twj siv tshuaj lom neeg thiab cov hlua tho, qhov twg cov khoom siv ib txwm ua tsis tiav, cov pob zeb ceramic muab lub neej ntev, hnav tsis kam, thiab tej zaum yuav ua tau zoo.

Magnesia-stabilized zirconia (MSZ) muaj kev tiv thaiv zoo dua rau kev yaig thiab thermal shock. Magnesium-stabilized zirconia tuaj yeem siv rau hauv li qub, twj, thiab gaskets vim nws muaj kev hnav zoo heev thiab kev tiv thaiv corrosion. Nws tseem yog cov khoom siv zoo tshaj plaws rau cov khoom siv petrochemical thiab tshuaj ua haujlwm.

High-temperature refractory ceramic khoom 3YSZ, los yog qhov peb tuaj yeem hu ua tetragonal zirconia polycrystal (TZP), yog ua los ntawm zirconium oxide uas tau ruaj khov nrog 3% mol yttrium oxide.

Cov khoom siv uas tsis yog xim hlau muaj xws li silicon thiab nitrogen, silicon nitride (Si3N4) kuj yog cov khoom siv ceramic zoo tshaj plaws nrog kev sib xyaw ua ke ntawm txhua yam, thermal, thiab hluav taws xob. Tsis tas li ntawd, piv rau lwm cov ceramics feem ntau, nws yog cov khoom siv ua haujlwm siab nrog cov thermal expansion coefficient uas muaj cov thermal shock kuj zoo heev.

Pyrolytic BN lossis PBN yog luv rau pyrolytic boron nitride. Nws yog ib hom hexagonal boron nitride tsim los ntawm cov tshuaj vapor deposition (CVD) txoj kev, kuj yog ib qho ntshiab boron nitride uas muaj peev xwm ncav cuag ntau tshaj 99.99%, npog yuav luag tsis muaj porosity.

Silicon carbide (SiC) yog cov khoom siv ceramic uas nquag loj hlob raws li ib qho siv lead ua rau kev siv semiconductor. Vim nws cov khoom siv hauv paus ntsiab lus thiab kev loj hlob ib leeg-crystal, nws yog ib qho ntawm cov khoom siv hluav taws xob ruaj khov tshaj plaws ntawm kev ua lag luam. Qhov no durability ncua deb tshaj nws cov hluav taws xob functionality.

Boron Nitride (BN) ceramics yog cov zoo tshaj plaws-qib ceramics. Lawv muab cov khoom tshwj xeeb kub-tiv taus, xws li thermal conductivities, siab dielectric zog thiab tshwj xeeb tshuaj inertness los daws cov teeb meem nyob rau hauv ib co ntawm lub ntiaj teb no feem ntau xav tau daim ntawv thov.

Substrates ua los ntawm nyias zaj duab xis ceramic kuj raug xa mus rau cov khoom siv semiconductor. Nws yog tsim los ntawm ib tug xov tooj ntawm cov txheej nyias nyias uas tau tsim los siv lub tshuab nqus tsev txheej, deposition, los yog sputtering txoj kev. Cov ntawv iav nrog lub thickness tsawg tshaj li ib millimeter uas yog ob-dimensional (flat) los yog peb-dimensional yog suav tias yog nyias-film ceramic substrates. Lawv tuaj yeem tsim los ntawm v